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Microfluidics, BioMEMS, and Medical Microsystems XV

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Microfluidics, BioMEMS, and Medical Microsystems XX

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Microlithographic Techniques in IC Fabrication

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Microlithography and Metrology in Micromachining

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Microlithography and Metrology in Micromachining II

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Micromachined Devices and Components

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Micromachined Devices and Components II

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Micromachined Devices and Components III

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Micromachined Devices and Components IV

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Micromachined Devices and Components V

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Micromachined Devices and Components VI

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Micromachining and Imaging

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Micromachining and Microfabrication

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Micromachining Technology for Micro-Optics

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