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  6. Micro Electro Mechanical Systems, 1989, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'. IEEE

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e-Journal Title Micro Electro Mechanical Systems, 1989, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'. IEEE
Publisher IEL
Access Year From 1989 To 1989
Source eSS
Access online Access online
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