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  6. Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE.

Description

e-Journal Title Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE.
Publisher IEL
Access Year From 1993 To 1993
Source eSS
Access online Access online
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